Slide 17 of 28 Notes:

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The MicroStructures and Sensors Lab is headed by the Design Division's newest faculty member, Prof. Tom Kenny.
• Tom brings his background in applied physics and experience at JPL to bear on the development and characterization of sensors produced using MEMS technology.
• Examples include precision accelerometers using tunneling electron current, force transducers and thermal sensors.
• Tom collaborates with Prof. Ken Goodson (TSD) on projects involving micro-scale fluid and heat transfer.
• Other collaborations involve the Center for Integrated Systems (EE) and the Applied Physics group at Stanford.