Slide 17 of 28
Notes:
The MicroStructures and Sensors Lab is headed by the Design Division's newest faculty member, Prof. Tom Kenny.
- Tom brings his background in applied physics and experience at JPL to bear on the development and characterization of sensors produced using MEMS technology.
- Examples include precision accelerometers using tunneling electron current, force transducers and thermal sensors.
- Tom collaborates with Prof. Ken Goodson (TSD) on projects involving micro-scale fluid and heat transfer.
- Other collaborations involve the Center for Integrated Systems (EE) and the Applied Physics group at Stanford.